Alain Bosseboeuf - Concepedia

Author

Alain Bosseboeuf

Université Paris-Sud ORCID

Also Known As

A Bosseboeuf, A. BOSSEBOEUF, A. Bosseboeuf, Alain Bosseboeuf, Bosseboeuf, A., Bosseboeuf, Alain

198

Publications

Citations

H-Index

108

Concepts

All Affiliations

Université Paris-Sud Centre National de la Recherche Scientifique Université Paris-Saclay Université Paris Cité Commissariat à l'Énergie Atomique et aux Énergies Alternatives

About

Alain Bosseboeuf is an author at Université Paris-Sud specializing in engineering, applied physics, and microfabrication.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	19	49	1.3K
2	Education	5	5	120
3	Medicine	2	2	26
4	Health Sciences	1	1	12
5	Natural Sciences	1	1	14

Alain Bosseboeuf

Publications

1.7K

Citations

H-Index

Page 1

	Year	Citations
Piezoelectric micromachined ultrasonic transducers based on PZT thin films Paul Muralt, Nicolas Ledermann, J. Paborowski, IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control	2005	328
Control of direct band gap emission of bulk germanium by mechanical tensile strain M. El Kurdi, Hervé Bertin, Emile Martincic, Applied Physics Letters Materials EngineeringMaterials ScienceThin Germanium MembraneIi-vi SemiconductorEngineering	2010	141
3D measurement of micromechanical devices vibration mode shapes with a stroboscopic interferometric microscope Sylvain Petitgrand, Réda Yahiaoui, K. Danaie, Optics and Lasers in Engineering EngineeringMicromechanicsMicromachinesMicrofabricationMechanics	2001	119
Characterization of the static and dynamic behaviour of M(O)EMS by optical techniques: status and trends Alain Bosseboeuf, Sylvain Petitgrand Journal of Micromechanics and Microengineering Optical MaterialsEngineeringOptical Transmission SystemMicroscopyDynamic Behaviour	2003	117
Permalloy electroplating through photoresist molds Jean-Marie Quemper, Stéphane Nicolas, Jean-Paul Gilles, Sensors and Actuators A Physical Materials ScienceElectroactive MaterialElectrometallurgyEngineeringMicrofabrication	1999	65
Highly decoupled single-crystal silicon resonators: an approach for the intrinsic quality factor Baptiste Le Foulgoc, Tarik Bourouina, O. Le Traon, Journal of Micromechanics and Microengineering Optical MaterialsEngineeringMechanical EngineeringIntegrated CircuitsSilicon On Insulator	2006	53
Application of microscopic interferometry techniques in the MEMS field Alain Bosseboeuf, Sylvain Petitgrand Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringMeasurementMicroscopyOptical TestingMechanical Engineering	2003	50
Simultaneous mapping of out-of-plane and in-plane vibrations of MEMS with (sub)nanometer resolution Sylvain Petitgrand, Alain Bosseboeuf Journal of Micromechanics and Microengineering EngineeringMicroscopyMechanical EngineeringNanometer ResolutionOptomechanical System	2004	39
Gold metallizations for eutectic bonding of silicon wafers Sébastien Lani, Alain Bosseboeuf, B. Bélier, Microsystem Technologies Materials EngineeringMaterials ScienceGold MetallizationsEngineeringWafer Scale Processing	2006	34
<title>Quantitative time-averaged microscopic interferometry for micromechanical device vibration mode characterization</title> Sylvain Petitgrand, Réda Yahiaoui, Alain Bosseboeuf, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringMicromechanicsMeasurementMicroscopyOptical Testing	2001	32

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