Alain Bosseboeuf

Piezoelectric micromachined ultrasonic transducers based on PZT thin films

Paul Muralt, Nicolas Ledermann, J. Paborowski et al. · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 2005 · 328 citations · Full text

Control of direct band gap emission of bulk germanium by mechanical tensile strain

M. El Kurdi, Hervé Bertin, Emile Martincic et al. · Applied Physics Letters · 2010 · 141 citations

Materials Engineering, Materials Science, Thin Germanium Membrane +15

3D measurement of micromechanical devices vibration mode shapes with a stroboscopic interferometric microscope

Sylvain Petitgrand, Réda Yahiaoui, K. Danaie et al. · Optics and Lasers in Engineering · 2001 · 119 citations

Engineering, Micromechanics, Micromachines +9

Characterization of the static and dynamic behaviour of M(O)EMS by optical techniques: status and trends

Alain Bosseboeuf, Sylvain Petitgrand · Journal of Micromechanics and Microengineering · 2003 · 117 citations

Optical Materials, Engineering, Optical Transmission System +20

Permalloy electroplating through photoresist molds

Jean-Marie Quemper, Stéphane Nicolas, Jean-Paul Gilles et al. · Sensors and Actuators A Physical · 1999 · 65 citations

Materials Science, Electroactive Material, Electrometallurgy +4