Publication | Closed Access
3D measurement of micromechanical devices vibration mode shapes with a stroboscopic interferometric microscope
119
Citations
32
References
2001
Year
EngineeringMicromechanicsMicromachinesMicrofabricationMechanicsMechanical EngineeringVibration MeasurementMechanical SystemsStroboscopic Interferometric MicroscopeInstrumentationVibration ControlMicro-electromechanical System
| Year | Citations | |
|---|---|---|
Page 1
Page 1