Concepedia

Sylvain Petitgrand

SP

11

Publications

767

Citations

10

H-Index

2001

Active since

Affiliations

Université Paris-Saclay(Current)

Université Paris-Sud

Centre National de la Recherche Scientifique

École Polytechnique Fédérale de Lausanne

Université Sorbonne Paris Nord

Sylvain Petitgrand is an author at Université Paris-Saclay specializing in engineering, microfabrication, and mechanical engineering.

Top concepts

EngineeringMicrofabricationMechanical EngineeringInstrumentationMicroscopyPhysicsApplied PhysicsOptical PropertiesBiomedical EngineeringMeasurement

Publications per year

2001–2005

11

Publications

11

Piezoelectric micromachined ultrasonic transducers based on PZT thin films

Paul Muralt, Nicolas Ledermann, J. Paborowski et al. · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 2005 · 328 citations · Full text

3D measurement of micromechanical devices vibration mode shapes with a stroboscopic interferometric microscope

Sylvain Petitgrand, Réda Yahiaoui, K. Danaie et al. · Optics and Lasers in Engineering · 2001 · 119 citations

Engineering, Micromechanics, Micromachines +9

Characterization of the static and dynamic behaviour of M(O)EMS by optical techniques: status and trends

Alain Bosseboeuf, Sylvain Petitgrand · Journal of Micromechanics and Microengineering · 2003 · 117 citations

Optical Materials, Engineering, Optical Transmission System +20

Application of microscopic interferometry techniques in the MEMS field

Alain Bosseboeuf, Sylvain Petitgrand · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 50 citations

Engineering, Measurement, Microscopy +16

Simultaneous mapping of out-of-plane and in-plane vibrations of MEMS with (sub)nanometer resolution

Sylvain Petitgrand, Alain Bosseboeuf · Journal of Micromechanics and Microengineering · 2004 · 39 citations

Engineering, Microscopy, Mechanical Engineering +31

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