Simultaneous mapping of out-of-plane and in-plane vibrations of MEMS with (sub)nanometer resolution

Abstract

It is demonstrated that stroboscopic optical microscopy combined with image processing is able to detect and map in-plane bi-directional vibrations of microstructures at video rate with a detection limit down to 0.1 nm in the frequency bandwidth 0–4 MHz. Furthermore, this technique was combined with phase shifting stroboscopic interferometry and light pulse delay shifting to provide simultaneously amplitude and phase maps of out-of-plane and in-plane vibrations of micromechanical devices. Application of these techniques is illustrated on Al microdevices with pattern sizes in the micron range.