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A low-cost built-in self-test method for thermally actuated resistive MEMS sensors

Electrical EngineeringEngineeringSensorsMicrofabricationMechanical EngineeringNano Electro Mechanical SystemResistive Mems SensorsMicroactuatorElectronic PackagingInstrumentationMicroelectronicsThermal EngineeringThermal SensorSensor TechnologyMicro-electromechanical System