Ion implanted MOSFETs with very short channel lengths

Design of micron MOS switching devices

R.H. Dennard, F.H. Gaensslen, L. Kuhn et al. · 1972 · 113 citations

Engineering, Electrical Engineering, Microelectronics +16

Steady State Mathematical Theory for the Insulated Gate Field Effect Transistor

David P. Kennedy, P. C. Murley · IBM Journal of Research and Development · 1973 · 55 citations

Engineering, Electrical Engineering, Microelectronics +11

Device design considerations for ion implanted MOSFETs

V.L. Rideout, F.H. Gaensslen, A. LeBlanc · 1973 · 11 citations

Engineering, Electrical Engineering, Electronic Materials +11