1973 · 11 citations · 4 references
EngineeringElectrical EngineeringElectronic MaterialsMicroelectronicsSemiconductor DevicesCmos Circuit DesignDevice CharacterizationDevice DesignDevice ModelingDevice ScalingIon ImplantationHigh Current Ion ImplantationIon Implantation EffectsMosfet Modeling
4
Ion implanted MOSFETs with very short channel lengths
R.H. Dennard, F.H. Gaensslen, H.N. Yu et al. · 1973 · 15 citations
Engineering, Electrical Engineering, Electronic Materials +10