IEEE/LEOS International Conference on Optical MEMS · 2003 · 10 citations · 0 references
EngineeringMechanical EngineeringMicroelectromechanical SystemsMicrofabricationOpticsConfocal MicroscopyMems CharacterizationMems DesignMems FabricationOptical MemsScanning Probe MicroscopyFlatness MeasurementMems MetrologyMems MirrorsMicroscope ImagingMicroscopyMicroscopy ImagingQ FactorSilicon Nitride
We have developed an electrostatic gimbal scanner for a unique miniature confocal microscope. The mirror flatness and Q factor are controlled by a stress-controlled silicon nitride. 12 deg. scan angle and 80 nm (PV) mirror flatness are achieved.