IEEE/LEOS International Conference on Optical MEMS

Optical coherence tomography: technology and applications

James G. Fujimoto · 2003 · 387 citations

Engineering, Biomedical Engineering, Ophthalmology +16

A 2-axis comb-driven micromirror array for 3D MEMS switches

Y. Mizuno, Osamu Tsuboi, Norinao Kouma et al. · 2003 · 30 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Single Si crystal 1024 ch MEMS mirror based on terraced electrodes and a high-aspect ratio torsion spring for 3-D cross-connect switch

Ryo Sawada, Joji Yamaguchi, Eiji Higurashi et al. · 2003 · 28 citations

Engineering, Electrical Engineering, Materials Science +13

MEMS reflective type variable optical attenuator using off-axis misalignment

Che-Heung Kim, Namkyoo Park, Yong‐Kweon Kim · 2003 · 28 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Open-loop operation of MEMS WDM routers with analog micromirror array

Shiang‐Suo Huang, Jui-che Tsai, Dooyoung Hah et al. · 2003 · 25 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +16