Norinao Kouma

A 2-axis comb-driven micromirror array for 3D MEMS switches

Y. Mizuno, Osamu Tsuboi, Norinao Kouma et al. · IEEE/LEOS International Conference on Optical MEMS · 2003 · 30 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

A full-time accelerated vertical comb-driven micromirror for high speed 30-degree scanning

Osamu Tsuboi, Xiaoyu Mi, Norinao Kouma et al. · 2004 · 15 citations

Engineering, Manufacturing Engineering, Mechanical Engineering +14

A high-output-voltage micro-thermoelectric generator having high-aspect-ratio structure

Norinao Kouma, Tatsuya NISHINO, Osamu Tsuboi · Journal of Micromechanics and Microengineering · 2013 · 14 citations

Engineering, Materials Engineering, Materials Science +13

Uniformity improvement of Josephson-junction resistance by considering sidewall deposition during shadow evaporation for large-scale integration of qubits

Tsuyoshi Takahashi, Norinao Kouma, Yoshiyasu Doi et al. · Japanese Journal of Applied Physics · 2022 · 14 citations · Full text

Natural Sciences, Electrical Engineering, Physics +17

A multi-step DRIE process for a 128 × 128 micromirror array

Norinao Kouma, Osamu Tsuboi, Y. Mizuno et al. · 2004 · 11 citations

Engineering, Electrical Engineering, Manufacturing Engineering +12