Publication | Closed Access
A multi-step DRIE process for a 128 × 128 micromirror array
11
Citations
0
References
2004
Year
Unknown Venue
PhotonicsEngineeringHigh Resonance FrequencyMicrofabricationMicromirror ArrayMulti-step Drie ProcessComputer ArchitectureComputer EngineeringIntegrated CircuitsBiomedical EngineeringOptical Systems× 128MicroelectronicsMicro-optical ComponentMicro Technology
A multi-step DRIE process for fabricating a vertical comb-driven micromirror array with five different heights was developed. This process was used to fabricate a dual-axis 128 /spl times/ 128 micromirror array with a high resonance frequency.