H. Soneda

A rotational comb-driven micromirror with a large deflection angle and low drive voltage

Osamu Tsuboi, Y. Mizuno, N. Koma et al. · 2003 · 44 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +13

A 2-axis comb-driven micromirror array for 3D MEMS switches

Y. Mizuno, Osamu Tsuboi, Norinao Kouma et al. · IEEE/LEOS International Conference on Optical MEMS · 2003 · 30 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

A full-time accelerated vertical comb-driven micromirror for high speed 30-degree scanning

Osamu Tsuboi, Xiaoyu Mi, Norinao Kouma et al. · 2004 · 15 citations

Engineering, Manufacturing Engineering, Mechanical Engineering +14

Smart power strip network and visualization server to motivate energy conservation in office

Fumihiko Nakazawa, H. Soneda, Osamu Tsuboi et al. · 2011 · 14 citations

Engineering, Electrical Engineering, Visualization +17

A multi-step DRIE process for a 128 × 128 micromirror array

Norinao Kouma, Osamu Tsuboi, Y. Mizuno et al. · 2004 · 11 citations

Engineering, Electrical Engineering, Manufacturing Engineering +12