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A rotational comb-driven micromirror with a large deflection angle and low drive voltage
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2003
Year
Unknown Venue
PhotonicsV-shaped Torsion BarEngineeringLow Drive VoltageMicrofabricationMechanical EngineeringApplied PhysicsTorsion BarRotational Comb-driven MicromirrorOptomechanicsMicro-optical ComponentMicrofluidicsComb-driven MicromirrorLarge Deflection AngleMicro-electromechanical SystemMicroelectronics
We have designed, fabricated, and tested a V-shaped torsion bar for use with a comb-driven micromirror. This torsion bar suppressed undesired sticking of the comb teeth, and enabled a large rotational angle and a low drive voltage. We observed 5-degree rotation of a comb-driven micromirror with a drive voltage of 90 V.