16
Publications
511
Citations
11
H-Index
1958
Active since
Affiliations
K. Murakami is an author at Tohoku University specializing in engineering, materials science, and polymer science.
Top concepts
EngineeringMaterial SciencePolymer SciencePolymer ChemistryChemistryPolymersApplied PhysicsMicrofabricationMechanical EngineeringInstrumentation
Publications per year
1958–2007
16
16
Cryogenic dry etching for high aspect ratio microstructures
K. Murakami, Yoshihiro Wakabayashi, Kazuyuki MINAMI et al. · 2002 · 41 citations
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1–5 of 16