Yoshihiro Wakabayashi is an author at Tohoku University specializing in applied physics, engineering, and materials science.
Top concepts
EngineeringApplied PhysicsMicrostructureMaterial ScienceMicrofabricationNanomanufacturingMaterials FabricationPhysicsChemistryPhotonics
Publications per year
1991–2002
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Cryogenic dry etching for high aspect ratio microstructures
K. Murakami, Yoshihiro Wakabayashi, Kazuyuki MINAMI et al. · 2002 · 41 citations
YAG laser assisted etching for releasing silicon micro structure
Kazuyuki MINAMI, Yoshihiro Wakabayashi, T. Matsubara et al. · 2002 · 11 citations
Diffusion in Copper-rich Copper-Silicon Alloys
Yoshiaki Iijima, Yoshihiro Wakabayashi, Toshihiko Itoga et al. · Materials Transactions JIM · 1991 · 10 citations · Full text
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