Statistics
Publications
4
Citations
110
H-Index
4
Active since
1990
Affiliations
The University of Osaka(Current)
T. Matsubara is an author at The University of Osaka specializing in materials science, materials engineering, and natural sciences.
Publications per year
1990–2002
4
4
YAG laser assisted etching for releasing silicon micro structure
Kazuyuki MINAMI, Yoshihiro Wakabayashi, T. Matsubara et al. · 2002 · 11 citations
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