Concepedia

Toshihiko Itoga

TI

15

Publications

322

Citations

12

H-Index

1989

Active since

Affiliations

Hitachi (Japan)(Current)

Tohoku University

Toshihiko Itoga is an author at Hitachi (Japan) specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceMicroelectronicsElectrical EngineeringMaterials EngineeringChemical EngineeringChemistryNanoelectronicsSurface Science

Publications per year

1989–2002

15

Publications

15

Advantages of Fluorine Introduction in Boron Implanted Shallow p<sup>+</sup>/n-Junction Formation

K. Ohyu, Toshihiko Itoga, N. Natsuaki · Japanese Journal of Applied Physics · 1990 · 66 citations

Materials Science, Electrical Engineering, Semiconductor Device +12

Improvement of SiO<sub>2</sub>/Si Interface Properties Utilising Fluorine Ion Implantation and Drive-in Diffusion

K. Ohyu, Toshihiko Itoga, Yasushiro Nishioka et al. · Japanese Journal of Applied Physics · 1989 · 36 citations

Materials Science, Sio 2, Electrical Engineering +14

X-ray photoelectron spectroscopy study of submonolayer native oxides on HF-treated Si surfaces

Fumiko Yano, Akiko Hiraoka, Toshihiko Itoga et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1995 · 30 citations

Engineering, Oxidation Resistance, Chemistry +20

Process and properties of Pt/Pb(Zr, Ti)O<sub>3</sub>/Pt integrated ferroelectric capacitors

Kazuyoshi Torii, Hiroshi Kawakami, H. Miki et al. · Integrated ferroelectrics · 1997 · 26 citations

Non-volatile Memory, Engineering, Emerging Memory Technology +20

Influence of ion-implantation on native oxidation of Si in a clean-room atmosphere

Fumiko Yano, Akiko Hiraoka, Toshihiko Itoga et al. · Applied Surface Science · 1996 · 23 citations

Native Oxidation, Electrical Engineering, Chemical Engineering +9

Rows per page

1–5 of 15