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Quantitative depth profiling of photoacid generators in photoresist materials by near-edge X-ray absorption fine structure spectroscopy

Materials ScienceX-ray CrystallographyPhotoacid GeneratorsPhotoresist MaterialsX-ray SpectroscopyEngineeringPhotochemistryOptical PropertiesSpectroscopyNatural SciencesApplied PhysicsX-ray DiffractionQuantitative Depth ProfilingX-ray OpticX-ray Fluorescence