M. Rothschild

Effects of excimer laser irradiation on the transmission, index of refraction, and density of ultraviolet grade fused silica

M. Rothschild, D. J. Ehrlich, David C. Shaver · Applied Physics Letters · 1989 · 167 citations

Optical Materials, Engineering, Laser Science +26

Excimer-laser etching of diamond and hard carbon films by direct writing and optical projection

M. Rothschild, C. Arnone, D. J. Ehrlich · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 128 citations

Optical Materials, Engineering, Laser Applications +21

Immersion lithography at 157 nm

M. Switkes, M. Rothschild · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 115 citations

Optical Materials, Engineering, Electron-beam Lithography +17

Lithography with 157 nm lasers

T. M. Bloomstein, Mark W. Horn, M. Rothschild et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 105 citations · Full text

Optical Materials, Engineering, Electron-beam Lithography +24

A Nanoparticle Convective Directed Assembly Process for the Fabrication of Periodic Surface Enhanced Raman Spectroscopy Substrates

Vladimir Liberman, T. M. Bloomstein, S. Somu et al. · Advanced Materials · 2010 · 104 citations