75
Publications
2.7K
Citations
31
H-Index
1986
Active since
M. Rothschild is an author at MIT Lincoln Laboratory specializing in engineering, applied physics, and materials science.
Top concepts
EngineeringApplied PhysicsMaterial ScienceOptical PropertiesOptical MaterialsOptoelectronicsPhysicsLaser ApplicationsPhotonicsMicrofabrication
Publications per year
1986–2019
75
75
Lithography with 157 nm lasers
T. M. Bloomstein, Mark W. Horn, M. Rothschild et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 105 citations · Full text
Optical Materials, Engineering, Electron-beam Lithography +24
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1–5 of 75