T. M. Bloomstein

Lithography with 157 nm lasers

T. M. Bloomstein, Mark W. Horn, M. Rothschild et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 105 citations · Full text

Engineering, Materials Engineering, Materials Science +14

A Nanoparticle Convective Directed Assembly Process for the Fabrication of Periodic Surface Enhanced Raman Spectroscopy Substrates

Vladimir Liberman, T. M. Bloomstein, S. Somu et al. · Advanced Materials · 2010 · 105 citations

Natural Sciences, Materials Engineering, Materials Science +14

22-nm immersion interference lithography

T. M. Bloomstein, Michael Marchant, S. Deneault et al. · Optics Express · 2006 · 71 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +14

Critical issues in 157 nm lithography

T. M. Bloomstein, M. Rothschild, Rainer Kunz et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 64 citations

Natural Sciences, Materials Engineering, Materials Science +17

Review of technology for 157-nm lithography

A. K. Bates, M. Rothschild, T. M. Bloomstein et al. · IBM Journal of Research and Development · 2001 · 60 citations

Engineering, Materials Engineering, Materials Science +11