Concepedia

T. M. Bloomstein

TM

26

Publications

964

Citations

17

H-Index

1985

Active since

Affiliations

MIT Lincoln Laboratory(Current)

Massachusetts Institute of Technology

K Lab (United States)

Intel (United States)

T. M. Bloomstein is an author at MIT Lincoln Laboratory specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceMicrofabricationOptical PropertiesOptical MaterialsNanofabricationNanolithographyOptoelectronicsPhotonics

Publications per year

1985–2010

26

Publications

26

Lithography with 157 nm lasers

T. M. Bloomstein, Mark W. Horn, M. Rothschild et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 105 citations · Full text

Optical Materials, Engineering, Electron-beam Lithography +24

A Nanoparticle Convective Directed Assembly Process for the Fabrication of Periodic Surface Enhanced Raman Spectroscopy Substrates

Vladimir Liberman, T. M. Bloomstein, S. Somu et al. · Advanced Materials · 2010 · 104 citations

22-nm immersion interference lithography

T. M. Bloomstein, Michael Marchant, S. Deneault et al. · Optics Express · 2006 · 71 citations · Full text

Materials Science, Photonics, Optical Materials +15

Critical issues in 157 nm lithography

T. M. Bloomstein, M. Rothschild, Rainer Kunz et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 64 citations

Short Wavelength Optic, Optical Materials, Engineering +26

Review of technology for 157-nm lithography

A. K. Bates, M. Rothschild, T. M. Bloomstein et al. · IBM Journal of Research and Development · 2001 · 60 citations

Materials Science, Materials Engineering, Critical Issues +14

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