Concepedia

Rainer Kunz

RK

Statistics

Publications

4

Citations

236

H-Index

4

Active since

1989

Affiliations

Massachusetts Institute of Technology(Current)

MIT Lincoln Laboratory

Christian-Albrechts-Universität zu Kiel

Rainer Kunz is an author at Massachusetts Institute of Technology specializing in materials science, materials engineering, and natural sciences.

Publications per year

1989–2006

4

Publications

4

Strain-controlled growth of nanowires within thin-film cracks

Rainer Adelung, Oral Cenk Aktas, Janice Franc et al. · Nature Materials · 2004 · 140 citations

Natural Sciences, Materials Engineering, Materials Science +14

Critical issues in 157 nm lithography

T. M. Bloomstein, M. Rothschild, Rainer Kunz et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 64 citations

Natural Sciences, Materials Engineering, Materials Science +17

Employing Thin‐Film Delamination for the Formation of Shadow Masks for Nanostructure Fabrication

Mady Elbahri, Sourav Rudra, Sebastian Wille et al. · Advanced Materials · 2006 · 19 citations

Natural Sciences, Materials Engineering, Materials Science +16

Aluminum oxides as imaging materials for 193-nm excimer laser lithography

S. W. Pang, Rainer Kunz, M. Rothschild et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 13 citations

Natural Sciences, Materials Engineering, Materials Science +15

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