Concepedia

A. K. Bates

AK

Statistics

Publications

5

Citations

210

H-Index

5

Active since

1999

Affiliations

Massachusetts Institute of Technology(Current)

MIT Lincoln Laboratory

Intel (United States)

A. K. Bates is an author at Massachusetts Institute of Technology specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceNanofabricationNanolithographyOptical PropertiesPhotonicsMicrofabricationOptical MaterialsCorrosion

Publications per year

1999–2001

5

Publications

5

Review of technology for 157-nm lithography

A. K. Bates, M. Rothschild, T. M. Bloomstein et al. · IBM Journal of Research and Development · 2001 · 60 citations

Materials Science, Materials Engineering, Critical Issues +14

Materials issues for optical components and photomasks in 157 nm lithography

Vladimir Liberman, T. M. Bloomstein, M. Rothschild et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 54 citations

Optical Materials, Engineering, Electron-beam Lithography +22

157 nm: Deepest deep-ultraviolet yet

M. Rothschild, T. M. Bloomstein, Jane E. Curtin et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 48 citations

Ultraviolet Light, Short Wavelength Optic, Optical Materials +23

Excimer-laser-induced degradation of fused silica and calcium fluoride for 193-nm lithographic applications

Vladimir Liberman, M. Rothschild, Jan Sedláček et al. · Optics Letters · 1999 · 37 citations

Materials Science, Photonics, Marathon Irradiation Chamber +13

A Parametric Study of Offset Gravure Coating

Nikil Kapur, Philip Gaskell, A. K. Bates · Process Safety and Environmental Protection · 2001 · 11 citations

Tribological Coating, Multi-functional Coating, Offset Gravure Coating +1

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