Statistics
Publications
5
Citations
210
H-Index
5
Active since
1999
Affiliations
A. K. Bates is an author at Massachusetts Institute of Technology specializing in materials science, materials engineering, and natural sciences.
Publications per year
1999–2001
5
5
Review of technology for 157-nm lithography
A. K. Bates, M. Rothschild, T. M. Bloomstein et al. · IBM Journal of Research and Development · 2001 · 60 citations
Materials issues for optical components and photomasks in 157 nm lithography
Vladimir Liberman, T. M. Bloomstein, M. Rothschild et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 54 citations
Natural Sciences, Materials Engineering, Materials Science +16
157 nm: Deepest deep-ultraviolet yet
M. Rothschild, T. M. Bloomstein, Jane E. Curtin et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 48 citations
Natural Sciences, Manufacturing Engineering, Materials Science +11
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