Concepedia

Jane E. Curtin

JE

7

Publications

294

Citations

7

H-Index

1997

Active since

Affiliations

MIT Lincoln Laboratory(Current)

Massachusetts Institute of Technology

K Lab (United States)

Jane E. Curtin is an author at MIT Lincoln Laboratory specializing in engineering, materials science, and applied physics.

Top concepts

EngineeringApplied PhysicsMaterial ScienceOptical PropertiesPhysicsMicroelectronicsOptical MaterialsNanoelectronicsNanofabricationOptoelectronics

Publications per year

1997–2000

7

Publications

7

Nanochannel fabrication for chemical sensors

Margaret B. Stern, M. W. Geis, Jane E. Curtin · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 92 citations

Ionic Constituents, Engineering, Nanoporous Material +16

157 nm: Deepest deep-ultraviolet yet

M. Rothschild, T. M. Bloomstein, Jane E. Curtin et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 48 citations

Ultraviolet Light, Short Wavelength Optic, Optical Materials +23

Outlook for 157-nm resist design

Roderick R. Kunz, T. M. Bloomstein, D. E. Hardy et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 47 citations

Outlook for 157 nm resist design

Roderick R. Kunz, T. M. Bloomstein, D. E. Hardy et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 46 citations

Short Wavelength Optic, Optical Materials, Engineering +26

LASER MICROMACHINING OF SILICON: A NEW TECHNIQUE FOR FABRICATING HIGH QUALITY TERAHERTZ WAVEGUIDE COMPONENTS'

C. K. Walker, Gopal Narayanan, H. Knoepfle et al. · Softwaretechnik-Trends · 1997 · 34 citations

Rows per page

1–5 of 7