Microelectronic Engineering · 2000 · 50 citations · 21 references
EngineeringOxide ElectronicsNative OxideApplied PhysicsCondensed Matter Physics
21
General Relationship for the Thermal Oxidation of Silicon
B. E. Deal, Andrew S. Grove · Journal of Applied Physics · 1965 · 3.4K citations
J. R. Johnson · Nuclear Science and Engineering · 1965 · 2.2K citations
Growth of native oxide on a silicon surface
Mizuho Morita, T. Ohmi, Eiji HASEGAWA et al. · Journal of Applied Physics · 1990 · 868 citations
Materials Science, Materials Engineering, Chemical Engineering +11
<i>The Electrical Resistivity of Metals and Alloys</i>
Paul L. Rossiter, J. Bass · Physics Today · 1988 · 305 citations