New resonant accelerometer based on rigidity change

Abstract

We propose a new resonant accelerometer based on the principle of a resonator rigidity change caused by the applied acceleration. The rigidity change of the resonator consisting of parallel beams is induced by a change in its cross-sectional shape. The feasibility of this sensing principle was confirmed by FEM analysis. A frequency change rate of 10%/g was calculated, and the sensor was fabricated by surface micromachining technology using an SOI wafer. Furthermore, we confirmed that the double resonator structure which was designed based on the same principle had a lower cross-axis sensitivity.