Chr. Burrer

Etching front control of <110 > strips for corner compensation

Ming Bao, Chr. Burrer, J. Estéve et al. · Sensors and Actuators A Physical · 1993 · 64 citations

Corner Compensation

Resonant silicon accelerometers in bulk micromachining technology-an approach

Chr. Burrer, J. Estéve, E. Lora‐Tamayo · Journal of Microelectromechanical Systems · 1996 · 49 citations

Electrical Engineering, Different Accelerometer Types, Engineering +13

Electrochemical etch-stop characteristics of TMAH:IPA solutions

M.C. Acero, J. Estéve, Chr. Burrer et al. · Sensors and Actuators A Physical · 1995 · 35 citations

Chemical Engineering, Engineering, Electrode-electrolyte Interface +4

A novel resonant silicon accelerometer in bulk-micromachining technology

Chr. Burrer, J. Estéve · Sensors and Actuators A Physical · 1995 · 31 citations

Bulk-micromachining Technology, Electrical Engineering, Engineering +4

Fabrication and characterization of a twin-mass accelerometer

Chr. Burrer, J. Estéve, J.A. Plaza et al. · Sensors and Actuators A Physical · 1994 · 19 citations

Engineering, Measurement, Mechanical Engineering +7