A balanced resonant pressure sensor

Wafer bonding for silicon-on-insulator technologies

J. B. Lasky · Applied Physics Letters · 1986 · 574 citations

Engineering, Electrical Engineering, Materials Science +17

The Controlled Etching of Silicon in Catalyzed Ethylenediamine‐Pyrocatechol‐Water Solutions

Arnold Reisman, M. Berkenblit, S. A. Chan et al. · Journal of The Electrochemical Society · 1979 · 208 citations

Natural Sciences, Materials Engineering, Materials Science +17

Etched silicon vibrating sensor

J. C. Greenwood · Journal of Physics E Scientific Instruments · 1984 · 118 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

The Resonistor: A Frequency Selective Device Utilizing the Mechanical Resonance of a Silicon Substrate

Roman Wilfinger, Paul H. Bardell, D. S. Chhabra · IBM Journal of Research and Development · 1968 · 84 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Resonant silicon structures

R.A. Buser, Ν. F. de Rooij · Sensors and Actuators · 1989 · 62 citations · Full text