Atomic-layer chemical-vapor-deposition of silicon-nitride

Calculations of electron inelastic mean free paths. V. Data for 14 organic compounds over the 50–2000 eV range

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Growth of titanium dioxide thin films by atomic layer epitaxy

Mikko Ritala, Markku Leskelä, E. Nykänen et al. · Thin Solid Films · 1993 · 307 citations

Natural Sciences, Materials Engineering, Materials Science +14

Atomic layer epitaxy

C. H. L. Goodman, M. Pessa · Journal of Applied Physics · 1986 · 294 citations

Natural Sciences, Materials Engineering, Materials Science +17

Atomic layer controlled deposition of SiO2 and Al2O3 using ABAB… binary reaction sequence chemistry

Steven M. George, Ofer Sneh, Anne C. Dillon et al. · Applied Surface Science · 1994 · 84 citations

Natural Sciences, Materials Engineering, Materials Science +13

Analytical and chemical techniques in the study of surface species in atomic layer epitaxy

Suvi Haukka, E.-L. Lakomaa, Tuomo Suntola · Thin Solid Films · 1993 · 66 citations

Natural Sciences, Chemistry, Materials Science +16