Concepedia

Masakiyo Matsumura

MM

69

Publications

2K

Citations

25

H-Index

1980

Active since

Affiliations

Tokyo Institute of Technology(Current)

Masakiyo Matsumura is an author at Tokyo Institute of Technology specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceThin FilmsElectrical EngineeringSurface ScienceMicroelectronicsOptoelectronicsPhysicsMicrofabrication

Publications per year

1980–2010

69

Publications

69

A Novel Phase-Modulated Excimer-Laser Crystallization Method of Silicon Thin Films

Chang-Ho Oh Chang-Ho Oh, M. Ozawa, Masakiyo Matsumura · Japanese Journal of Applied Physics · 1998 · 143 citations

Optical Materials, Engineering, Crystal Growth Technology +18

Theoretical Analysis of Amorphous-Silicon Field-Effect-Transistors

Satoru Kishida, Yasuo Naruke, Yasutaka Uchida et al. · Japanese Journal of Applied Physics · 1983 · 87 citations

Device Modeling, Semiconductors, Electrical Engineering +15

Diagnostic Study of VHF Plasma and Deposition of Hydrogenated Amorphous Silicon Films

Shunri Oda, Jun'ichirou Noda, Masakiyo Matsumura · Japanese Journal of Applied Physics · 1990 · 78 citations

Diagnostic Study, Langmuir Probe Measurement, Engineering +24

Excimer-Laser-Induced Lateral-Growth of Silicon Thin-Films

Kensuke Ishikawa, M. Ozawa, Chang-Ho Oh Chang-Ho Oh et al. · Japanese Journal of Applied Physics · 1998 · 71 citations

Optical Materials, Engineering, Crystal Growth Technology +17

Atomic-layer chemical-vapor-deposition of silicon-nitride

Shunsuke Morishita, Satoshi Sugahara, Masakiyo Matsumura · Applied Surface Science · 1997 · 65 citations

Materials Science, Engineering, Surface Science +5

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