Fabrication and application of a full wafer size micro/nanostencil for multiple length-scale surface patterning - Concepedia

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Fabrication and application of a full wafer size micro/nanostencil for multiple length-scale surface patterning

DOI Full Paper Access

92

Citations

10

References

2003

Year

G. M. Kim, M A F van den Boogaart, Juergen Brügger

Microelectronic Engineering

Materials ScienceWafer Scale ProcessingEngineeringFlexible ElectronicsMicrofabricationNanotechnologyFabrication TechniqueApplied PhysicsPattern TransferNanolithographyNanofabricationMicrofluidics3D PrintingNanolithography Method

References

	Year	Citations

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