M A F van den Boogaart

Author

École Polytechnique Fédérale de Lausanne

Also Known As

Federico Rosei, M A F van den Boogaart, M. A. F. van den Boogaart, M.A.F. Van Den Boogaart, M.A.F. Van den Boogaart, M.A.F. van den Boogaart, M. A. F. van den Boogaart, Marc A F van den Boogaart, Marc A. F. van den Boogaart, Marc A.F. van den Boogaart

Publications

784

Citations

H-Index

Concepts

All Affiliations

École Polytechnique Fédérale de Lausanne Centre National de la Recherche Scientifique Swiss Center for Electronics and Microtechnology (Switzerland)Institut National des Sciences Appliquées de Toulouse Centre d’Élaboration de Matériaux et d’Études Structurales

About

M A F van den Boogaart is an author at École Polytechnique Fédérale de Lausanne specializing in engineering, applied physics, and microfabrication.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	15	17	563
2	Applied Physics	13	14	470
3	Biomedical Engineering	4	4	99
4	Electrical Engineering	2	2	42
5	Materials Engineering	1	1	10

M A F van den Boogaart

Publications

727

Citations

H-Index

Page 1

	Year	Citations
Metallic Nanowires by Full Wafer Stencil Lithography Oscar Vázquez-Mena, Veronica Savu, Katrin Sidler, Nano Letters	2008	106
Fabrication and application of a full wafer size micro/nanostencil for multiple length-scale surface patterning G. M. Kim, M A F van den Boogaart, Juergen Brügger Microelectronic Engineering Materials ScienceWafer Scale ProcessingEngineeringFlexible ElectronicsMicrofabrication	2003	92
Deep-ultraviolet–microelectromechanical systems stencils for high-throughput resistless patterning of mesoscopic structures M A F van den Boogaart, G. M. Kim, Rudy J. M. Pellens, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena Materials ScienceWafer Scale ProcessingEngineeringBeam LithographyMicrofabrication	2004	61
Full-wafer fabrication by nanostencil lithography of micro/nanomechanical mass sensors monolithically integrated with CMOS Julien Arcamone, M A F van den Boogaart, Francisco Serra-Graells, Nanotechnology NanosensorsEngineeringMechanical EngineeringSilicon Mechanical ResonatorsMicroelectromechanical Systems	2008	54
Predicting mask distortion, clogging and pattern transfer for stencil lithography Maryna Lishchynska, Victor Bourenkov, M A F van den Boogaart, Microelectronic Engineering EngineeringBeam LithographyMicrofabricationPattern TransferMask Distortion	2006	48
Corrugated membranes for improved pattern definition with micro/nanostencil lithography M A F van den Boogaart, Maryna Lishchynska, L M Doeswijk, Sensors and Actuators A Physical Materials ScienceMembrane StructureEngineeringFlexible ElectronicsMicrofabrication	2005	39
Formation of Metal Nano‐ and Micropatterns on Self‐Assembled Monolayers by Pulsed Laser Deposition Through Nanostencils and Electroless Deposition Emiel A. Speets, P. te Riele, M A F van den Boogaart, Advanced Functional Materials	2006	33
Reusability of nanostencils for the patterning of Aluminum nanostructures by selective wet etching Oscar Vázquez-Mena, M A F van den Boogaart, Veronica Savu, Microelectronic Engineering Materials ScienceEngineeringNanomaterialsNanotechnologyMicrofabrication	2008	32
A Compact and Low-Power CMOS Circuit for Fully Integrated NEMS Resonators Julien Arcamone, Bertrand Misischi, Francisco Serra-Graells, IEEE Transactions on Circuits and Systems II Analog and Digital Signal Processing Low-power ElectronicsElectrical EngineeringNanoelectromechanical SystemEngineeringMicrofabrication	2007	32
Etching of sub-micrometer structures through Stencil Oscar Vázquez-Mena, M A F van den Boogaart, Katrin Sidler, Microelectronic Engineering Materials ScienceEngineeringMicrofabricationMicroscopyMechanical Engineering	2008	29

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