Concepedia

M A F van den Boogaart

MA

20

Publications

727

Citations

16

H-Index

2002

Active since

Affiliations

École Polytechnique Fédérale de Lausanne(Current)

Centre National de la Recherche Scientifique

Swiss Center for Electronics and Microtechnology (Switzerland)

Institut National des Sciences Appliquées de Toulouse

Centre d’Élaboration de Matériaux et d’Études Structurales

M A F van den Boogaart is an author at École Polytechnique Fédérale de Lausanne specializing in engineering, applied physics, and microfabrication.

Top concepts

Publications per year

2002–2009

20

Publications

20

Metallic Nanowires by Full Wafer Stencil Lithography

Oscar Vázquez-Mena, Veronica Savu, Katrin Sidler et al. · Nano Letters · 2008 · 106 citations · Full text

Fabrication and application of a full wafer size micro/nanostencil for multiple length-scale surface patterning

G. M. Kim, M A F van den Boogaart, Juergen Brügger · Microelectronic Engineering · 2003 · 92 citations · Full text

, , +11

Deep-ultraviolet–microelectromechanical systems stencils for high-throughput resistless patterning of mesoscopic structures

M A F van den Boogaart, G. M. Kim, Rudy J. M. Pellens et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 61 citations · Full text

, , +15

Full-wafer fabrication by nanostencil lithography of micro/nanomechanical mass sensors monolithically integrated with CMOS

Julien Arcamone, M A F van den Boogaart, Francisco Serra-Graells et al. · Nanotechnology · 2008 · 54 citations · Full text

, , +21

Predicting mask distortion, clogging and pattern transfer for stencil lithography

Maryna Lishchynska, Victor Bourenkov, M A F van den Boogaart et al. · Microelectronic Engineering · 2006 · 48 citations · Full text

, , +4

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