Rudy J. M. Pellens

Deep-ultraviolet–microelectromechanical systems stencils for high-throughput resistless patterning of mesoscopic structures

M A F van den Boogaart, G. M. Kim, Rudy J. M. Pellens et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 61 citations · Full text

Materials Science, Wafer Scale Processing, Engineering +15

Densely integrated microring resonator based photonic devices for use in access networks

Edwin Klein, Patryk J. Urban, G. Sengo et al. · Optics Express · 2007 · 40 citations · Full text

Photonics, Electrical Engineering, Optical Materials +15

Novel aberration monitor for optical lithography

Peter Dirksen, C.A.H. Juffermans, Rudy J. M. Pellens et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 30 citations

Circular Phase Object, Optical Materials, Engineering +19

Effect of processing on the overlay performance of a wafer stepper

Peter Dirksen, C.A.H. Juffermans, Ad Leeuwestein et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1997 · 12 citations

Wafer Scale Processing, Engineering, Industrial Engineering +8

Front- to back-side overlay optimization after wafer bonding for 3D integration

Laurent Marinier, Wibo van Noort, Rudy J. M. Pellens et al. · Microelectronic Engineering · 2006 · 11 citations

3D Ic Architecture, Wafer Scale Processing, Engineering +11