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Laurent Marinier

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Publications

1

Citations

11

H-Index

1

Active since

2006

Affiliations

ASML (Netherlands)(Current)

Laurent Marinier is an author at ASML (Netherlands) specializing in 3d integration, microelectronics, and computer-aided design.

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Publications per year

2006–2006

1

Publications

1

Front- to back-side overlay optimization after wafer bonding for 3D integration

Laurent Marinier, Wibo van Noort, Rudy J. M. Pellens et al. · Microelectronic Engineering · 2006 · 11 citations

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