Julien Arcamone

Gas sensors based on gravimetric detection—A review

S. Fanget, Sébastien Hentz, Pierre Puget et al. · Sensors and Actuators B Chemical · 2011 · 195 citations

Engineering, Sensors, Measurement +7

Dynamic range enhancement of nonlinear nanomechanical resonant cantilevers for highly sensitive NEMS gas/mass sensor applications

Najib Kacem, Julien Arcamone, Francesc Pérez‐Murano et al. · Journal of Micromechanics and Microengineering · 2010 · 138 citations

Engineering, Mechanical Engineering, Microelectromechanical Systems +18

3-D Sequential Integration: A Key Enabling Technology for Heterogeneous Co-Integration of New Function With CMOS

P. Batude, T. Ernst, Julien Arcamone et al. · IEEE Journal on Emerging and Selected Topics in Circuits and Systems · 2012 · 107 citations

3-D Sequential Integration, Engineering, Vlsi Design +27

M&NEMS: A new approach for ultra-low cost 3D inertial sensor

Ph. Robert, van Nghi Nguyen, Sébastien Hentz et al. · 2009 · 81 citations

Engineering, Accelerometer Area, Measurement +21

3D Sequential Integration: Application-driven technological achievements and guidelines

P. Batude, Laurent Brunet, C. Fenouillet-Béranger et al. · 2017 · 73 citations

Contact Pitch, Engineering, 3D Modeling +26