27
Publications
741
Citations
16
H-Index
2008
Active since
Affiliations
Veronica Savu is an author at École Polytechnique Fédérale de Lausanne specializing in engineering, materials science, and applied physics.
Top concepts
EngineeringApplied PhysicsMaterial ScienceMicrofabricationNanotechnologyNanofabricationMicroelectronicsElectrical EngineeringNanomaterialsNanoelectronics
Publications per year
2008–2015
27
27
Metallic Nanowires by Full Wafer Stencil Lithography
Oscar Vázquez-Mena, Veronica Savu, Katrin Sidler et al. · Nano Letters · 2008 · 106 citations · Full text
Analysis of the blurring in stencil lithography
Oscar Vázquez-Mena, Luis Guillermo Villanueva, Veronica Savu et al. · Nanotechnology · 2009 · 72 citations · Full text
Sputtering of (001)AlN thin films: Control of polarity by a seed layer
Evgeny Milyutin, Scott Harada, Diego Martín et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 48 citations · Full text
Materials Engineering, Materials Science, Aluminium Nitride +14
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