Micro-patterning
Micro-Patterning is a micromachining technique that involves the precise fabrication of microscale features or structures on a substrate through selective material deposition, removal, or modification, distinguishing it from broader machining processes by its emphasis on micron-level resolution and pattern fidelity.
373
Publications
18.5K
Citations
1.6K
Authors
448
Institutions
Publications per year
2017–2026
74
Parents
373
Finer features for functional microdevices
Satoshi Kawata, Hong‐Bo Sun, Tomokazu Tanaka et al. · Nature · 2001 · 2.8K citations
H. W. Deckman, J. H. Dunsmuir · Applied Physics Letters · 1982 · 606 citations
1–5 of 373
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Fraunhofer Institute for Material and Beam Technology, Germany
5 publications · 234 citations
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5
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4
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1–5 of 1.6K
448
Harvard University
Cambridge, United States
18 h-index
57 publications
6.5K citations
École Polytechnique Fédérale de Lausanne
Lausanne, Switzerland
11 h-index
35 publications
1.9K citations
Seoul National University
Seoul, South Korea
11 h-index
50 publications
1.9K citations
Massachusetts Institute of Technology
Cambridge, United States
10 h-index
21 publications
1.8K citations

Chinese Academy of Sciences
Beijing, China
8 h-index
30 publications
532 citations

Seoul National University of Science and Technology
Seoul, South Korea
7 h-index
10 publications
260 citations
The University of Tokyo
Tokyo, Japan
7 h-index
19 publications
628 citations
Technische Universität Dresden
Dresden, Germany
7 h-index
28 publications
1.4K citations
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16 publications · 1.2K citations
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14 publications · 1.1K citations
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12 publications · 916 citations
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13 publications · 349 citations
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JMM · 12 publications · 311 citations
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