Concepedia

Publication | Closed Access

Natural lithography

604

Citations

5

References

1982

Year

Abstract

A new form of microfabrication is presented in which spherical colloidal particles are used to define a large area lithographic mask. A monolayer of colloidal particles is deposited in either random or ordered array over the entire surface of a macroscopic substrate. Large area random or ordered mosaic arrays of identical submicron microcolumnar structures are produced by using the colloidal particles as either an etching or deposition mask.

References

YearCitations

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