Publication | Closed Access
Investigation of hafnium-aluminate alloys in view of integration as interpoly dielectrics of future Flash memories
22
Citations
14
References
2007
Year
Materials EngineeringMaterials ScienceElectrical EngineeringEngineeringFlash MemoryApplied PhysicsInterpoly DielectricsHafnium-aluminate AlloysSemiconductor MemoryFuture Flash MemoriesMicroelectronicsPhase Change MemoryElectrical Insulation
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