Publication | Closed Access
Characterization and process effects of HfO2 thin films grown by metal-organic molecular beam epitaxy
50
Citations
25
References
2005
Year
Materials ScienceEngineeringNanotechnologySurface ScienceApplied PhysicsProcess EffectsChemical Vapor DepositionThin FilmsMolecular Beam EpitaxyEpitaxial GrowthHfo2 Thin FilmsThin Film Processing
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