EUV microscopy for defect inspection by dark-field mapping and zone plate zooming

Reduction imaging at 14 nm using multilayer-coated optics: Printing of features smaller than 0.1 μm

J. E. Bjorkholm, Jeffrey Bokor, L. Eichner et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1990 · 158 citations

Natural Sciences, Materials Engineering, Materials Science +15

Schwarzschild soft-x-ray microscope for imaging of nonradiating objects

I. A. Artioukov, Yu. S. Kas’yanov, A. I. Fedorenko et al. · Optics Letters · 1995 · 36 citations

Natural Sciences, Physics, Biomedical Optics +16

A Soft-X-Ray Imaging Microscope with a Multilayer-Coated Schwarzschild Objective: Imaging Tests

Mitsunori Toyoda, Yoshitaka Shitani, Mihiro Yanagihara et al. · Japanese Journal of Applied Physics · 2000 · 24 citations

Engineering, Materials Engineering, Materials Science +17

Imaging Schwarzschild multilayer x-ray microscope

Richard B. Hoover, Phillip C. Baker, David L. Shealy et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1993 · 22 citations

Natural Sciences, Materials Engineering, Materials Science +15

Aerial Image Mask Inspection System for Extreme Ultraviolet Lithography

Hiroo Kinoshita, Kazuhiro Hamamoto, Nobuyuki Sakaya et al. · Japanese Journal of Applied Physics · 2007 · 21 citations

Natural Sciences, Chemistry, Microfabrication +12