Mitsunori Toyoda

High throughput and wide field of view EUV microscope for blur-free one-shot imaging of living organisms

Takeo Ejima, Fumihiko Ishida, Hiromichi Murata et al. · Optics Express · 2010 · 29 citations · Full text

Natural Sciences, Biomedical Engineering, Biophysics +14

At-Wavelength Extreme Ultraviolet Lithography Mask Observation Using a High-Magnification Objective with Three Multilayer Mirrors

Mitsunori Toyoda, Kenjiro Yamasoe, Tadashi Hatano et al. · Applied Physics Express · 2012 · 24 citations

Natural Sciences, Physics, Optics +15

A Soft-X-Ray Imaging Microscope with a Multilayer-Coated Schwarzschild Objective: Imaging Tests

Mitsunori Toyoda, Yoshitaka Shitani, Mihiro Yanagihara et al. · Japanese Journal of Applied Physics · 2000 · 24 citations

Engineering, Materials Engineering, Materials Science +17

Simulation Analysis of the Characteristics of a High Magnification Imaging Optics for the Observation of Extreme Ultraviolet Lithography Mask to Predict Phase Defect Printability

Tsuneo Terasawa, Yukiyasu Arisawa, Tsuyoshi Amano et al. · Japanese Journal of Applied Physics · 2013 · 13 citations

Engineering, Physics, Digital Imaging +14

Demonstrating 30-nm spatial resolution of three-multilayer-mirror objective for extreme ultraviolet microscopy: Imaging test by observing lithography mask

Mitsunori Toyoda, Kenjiro Yamasoe, Akifumi Tokimasa et al. · Applied Physics Express · 2014 · 12 citations

Engineering, Biomedical Engineering, Biomedical Imaging +12