Statistics
Publications
5
Citations
69
H-Index
5
Active since
2008
Affiliations
University of Hyogo(Current)
Yukiyasu Arisawa is an author at University of Hyogo specializing in engineering, microfabrication, and physics.
Publications per year
2008–2013
5
5
Tsuneo Terasawa, Yukiyasu Arisawa, Tsuyoshi Amano et al. · Japanese Journal of Applied Physics · 2013 · 13 citations
Applicability of extreme ultraviolet lithography to fabrication of half pitch 35nm interconnects
Hajime Aoyama, Yuusuke Tanaka, Kazuo Tawarayama et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 13 citations
Engineering, Electrical Engineering, Manufacturing Engineering +17
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