Statistics
Publications
14
Citations
204
H-Index
11
Active since
1985
Affiliations
Takashi Kamo is an author at Toshiba (Japan) specializing in materials science, materials engineering, and natural sciences.
Publications per year
1985–2014
14
14
Actinic phase defect detection and printability analysis for patterned EUVL mask
Tsuneo Terasawa, Takeshi Yamane, Toshihiko Tanaka et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 24 citations
Natural Sciences, Materials Engineering, Materials Science +17
Takashi Kamo, Yoshiki Chujo, Takao Akatsuka et al. · SAE technical papers on CD-ROM/SAE technical paper series · 1985 · 20 citations
Engineering, Chemical Engineering, Mechanical Engineering +17
Phase defect printability and actinic dark-field mask blank inspection capability analyses
Tsuneo Terasawa, Takeshi Yamane, Takashi Kamo et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 16 citations
Natural Sciences, Materials Engineering, Materials Science +17
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