Concepedia

Kazuo Tawarayama

KT

Statistics

Publications

7

Citations

110

H-Index

7

Active since

2000

Affiliations

Toshiba (Japan)(Current)

Kazuo Tawarayama is an author at Toshiba (Japan) specializing in engineering, extreme ultraviolet lithography, and optical lithography.

Publications per year

2000–2011

7

Publications

7

Extreme Ultraviolet Lithography Using Small-Field Exposure Tool: Current Status

Kazuo Tawarayama, Shunko Magoshi, Yuusuke Tanaka et al. · Japanese Journal of Applied Physics · 2008 · 31 citations

Engineering, Electrical Engineering, Manufacturing Engineering +9

Aberration measurement from specific photolithographic images: a different approach

Hiroshi Nomura, Kazuo Tawarayama, Takuya Kohno · Applied Optics · 2000 · 19 citations

Engineering, Physics, Biomedical Optics +11

Recent progress of EUV full-field exposure tool in Selete

Kazuo Tawarayama, Hajime Aoyama, Shunko Magoshi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 13 citations

Engineering, Electrical Engineering, Instrumentation +12

Effects of aberration and flare on lithographic performance of SFET

Yuusuke Tanaka, Hajime Aoyama, Kazuo Tawarayama et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 13 citations

Medicine, Biomedical Engineering, Biomedical Optics +11

Applicability of extreme ultraviolet lithography to fabrication of half pitch 35nm interconnects

Hajime Aoyama, Yuusuke Tanaka, Kazuo Tawarayama et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 13 citations

Engineering, Electrical Engineering, Manufacturing Engineering +17

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