Concepedia
Statistics
Publications
27
Citations
577
H-Index
16
Active since
2001
Affiliations
RWTH Aachen University(Current)
Fraunhofer Institute for Laser Technology
Forschungszentrum Jülich
Jülich Aachen Research Alliance
University of Southampton
Larissa Juschkin is an author at RWTH Aachen University specializing in natural sciences, physics, and optics.
Publications per year
2001–2023
Fundamentals and limits for the EUV emission of pinch plasma sources for EUV lithography
Thomas Krücken, K. Bergmann, Larissa Juschkin et al. · Journal of Physics D Applied Physics · 2004 · 71 citations
Natural Sciences, Electrical Engineering, Physics +15
Optimization of a gas discharge plasma source for extreme ultraviolet interference lithography at a wavelength of 11 nm
K. Bergmann, Serhiy Danylyuk, Larissa Juschkin · Journal of Applied Physics · 2009 · 44 citations
Natural Sciences, Physics, Optics +12
Broadband transmission masks, gratings and filters for extreme ultraviolet and soft X-ray lithography
Sascha Brose, Serhiy Danylyuk, Larissa Juschkin et al. · Thin Solid Films · 2012 · 32 citations
Engineering, Electrical Engineering, Materials Science +16
EUV microscopy for defect inspection by dark-field mapping and zone plate zooming
Larissa Juschkin, Ralf Freiberger, K. Bergmann · Journal of Physics Conference Series · 2009 · 31 citations · Full text
Natural Sciences, Physics, Contrast Sensitivity +12
Ptychographic imaging with a compact gas–discharge plasma extreme ultraviolet light source
Michal Odstrčil, D. Rudolf, R. Bresenitz et al. · Optics Letters · 2015 · 31 citations · Full text
Natural Sciences, Physics, Biomedical Imaging +12
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