Concepedia
Statistics
Publications
7
Citations
158
H-Index
Active since
2012
Affiliations
RWTH Aachen University(Current)
Fraunhofer Institute for Laser Technology
Jülich Aachen Research Alliance
Forschungszentrum Jülich
Sascha Brose is an author at RWTH Aachen University specializing in materials science, optics, and natural sciences.
Publications per year
2012–2022
UV radiation enhanced oxygen vacancy formation caused by the PLD plasma plume
Felix V. E. Hensling, D. J. Keeble, Jiaxin Zhu et al. · Scientific Reports · 2018 · 49 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +13
Broadband transmission masks, gratings and filters for extreme ultraviolet and soft X-ray lithography
Sascha Brose, Serhiy Danylyuk, Larissa Juschkin et al. · Thin Solid Films · 2012 · 32 citations
Engineering, Electrical Engineering, Materials Science +16
Achromatic Talbot lithography with partially coherent extreme ultraviolet radiation: process window analysis
Sascha Brose, Jenny Tempeler, Serhiy Danylyuk et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2016 · 24 citations
Natural Sciences, Physics, Optics +12
Diffraction-assisted extreme ultraviolet proximity lithography for fabrication of nanophotonic arrays
Serhiy Danylyuk, Hyun‐Su Kim, Sascha Brose et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2013 · 17 citations · Full text
Engineering, Materials Science, Physics +15
Characterization of nanoscale gratings by spectroscopic reflectometry in the extreme ultraviolet with a stand-alone setup
Lukas Bahrenberg, Serhiy Danylyuk, Sven Glabisch et al. · Optics Express · 2020 · 16 citations · Full text
Natural Sciences, Materials Science, Physics +14
1–5 of 7