Sascha Brose

UV radiation enhanced oxygen vacancy formation caused by the PLD plasma plume

Felix V. E. Hensling, D. J. Keeble, Jiaxin Zhu et al. · Scientific Reports · 2018 · 48 citations · Full text

Broadband transmission masks, gratings and filters for extreme ultraviolet and soft X-ray lithography

Sascha Brose, Serhiy Danylyuk, Larissa Juschkin et al. · Thin Solid Films · 2012 · 31 citations

Photonics, Engineering, Electron-beam Lithography +11

Achromatic Talbot lithography with partially coherent extreme ultraviolet radiation: process window analysis

Sascha Brose, Jenny Tempeler, Serhiy Danylyuk et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2016 · 23 citations

Short Wavelength Optic, Engineering, Electron-beam Lithography +19

Diffraction-assisted extreme ultraviolet proximity lithography for fabrication of nanophotonic arrays

Serhiy Danylyuk, Hyun‐Su Kim, Sascha Brose et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2013 · 16 citations · Full text

Engineering, Nano-optics, Electron-beam Lithography +16

Characterization of nanoscale gratings by spectroscopic reflectometry in the extreme ultraviolet with a stand-alone setup

Lukas Bahrenberg, Serhiy Danylyuk, Sven Glabisch et al. · Optics Express · 2020 · 15 citations · Full text

Transient Grating, Ultraviolet Light, Short Wavelength Optic +20