Publication | Closed Access
Broadband transmission masks, gratings and filters for extreme ultraviolet and soft X-ray lithography
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Citations
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References
2012
Year
PhotonicsEngineeringElectron-beam LithographyBeam LithographyMicrofabricationOptical PropertiesApplied PhysicsSoft X-ray LithographyOptical SystemsX-ray OpticOptoelectronicsDepth-graded Multilayer CoatingBroadband Transmission MasksExtreme Ultraviolet
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