Publication | Closed Access
Analysis of conductivity degradation in gold/platinum-doped silicon
49
Citations
14
References
1996
Year
Materials ScienceSemiconductor TechnologyElectrical EngineeringEngineeringNanoelectronicsIntrinsic ImpurityApplied PhysicsDeep ImpuritiesConductivity DegradationSemiconductor MaterialGold/platinum DopingSilicon On InsulatorMicroelectronicsCharge Carrier Transport
A general model is presented, describing the effects of gold/platinum doping in silicon. The steady-state case is then analyzed with reference to the conductivity degradation due to deep impurities in realistic cases of n- and p-type materials. In particular, the different influence of gold with respect to platinum in n-type material, due to the localization in energy of the two acceptor levels, is quantitatively explained and reproduced.
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