Epitaxial growth of SiC in a chimney CVD reactor - Concepedia

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Epitaxial growth of SiC in a chimney CVD reactor

49

Citations

45

References

2002

Year

A. Ellison, J. Zhang, Anne Henry, Erik Janzén

Journal of Crystal Growth

Materials EngineeringChimney Cvd ReactorEngineeringApplied PhysicsCarbide

References

	Year	Citations

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