Fabrication and characterization of a multidirectional-sensitive contact-enhanced inertial microswitch with a electrophoretic flexible composite fixed electrode

Abstract

A multidirectional-sensitive inertial microswitch with a polymer–metal composite fixed electrode has been designed and fabricated based on surface micromachining in this work. The microswitch mainly consists of a suspended proof mass as a movable electrode and a T-shaped structure on the substrate with maple leaf-like top and cantilevers around the central cylinder as vertical and lateral fixed electrodes. It can sense the applied shock accelerations from any radial direction in the xoy plane and z-axis. The new vertical composite fixed electrode of the switch is completed by electroplating and electrophoretic deposition, which can realize a flexible contact between the electrodes and reduce the bounces and prolong the contact time. As a result, the stability and reliability of the inertial switch could be greatly improved. The fabricated microswitches have been tested and characterized by a standard dropping hammer system. It is shown that the threshold acceleration of the prototype is generally uniform in different sensitive directions in the xoy plane and z-axis, which is about 70 g. The contact time of the microswitch with the composite fixed electrode is ∼110 µs in the vertical direction, which is longer than that (∼65 µs) without a polymer. The test data are in agreement with dynamic finite-element simulation results.